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Analysis and design principles of MEMS devices

紀錄類型:	書目-語言資料,印刷品 : 單行本
作者:	BaoMin-Hang.,
其他團體作者:	ScienceDirect (Online service)
出版地:	Amsterdam
出版者:	Elsevier;
出版年:	2005.
面頁冊數:	xii, 312 p.ill. : 25 cm.;
標題:	Microelectromechanical systems. -
標題:	Electronic books. -
電子資源:	http://www.engineeringvillage.com/controller/servlet/OpenURL?genre=book&isbn=9780444516169
電子資源:	http://www.engineeringvillage.com/controller/servlet/OpenURL?genre=book&isbn=9780444516169
附註:	Electronic reproduction. Amsterdam : Elsevier Science & Technology, 2007.
摘要註:	Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book.
ISBN:	0444516166
內容註:	Chapter 1. Introduction to MEMS devices -- Chapter 2. Basic mechanics of beam and diaphragm structures -- Chapter 3. Air Damping -- Chapter 4. Electrostatic Actuation -- Chapter 5. Capacitive Sensing and Effects of Electrical Excitation -- Chapter 6. Piezoresistive Sensing.

Analysis and design principles of MEMS devices
Bao, Min-Hang.

Analysis and design principles of MEMS devices / by Minhang Bao. - Amsterdam : Elsevier, 2005.. - xii, 312 p. ; ill. ; 25 cm..
Chapter 1. Introduction to MEMS devices.
Electronic reproduction. Amsterdam : Elsevier Science & Technology, 2007..
Includes bibliographical references and index..
ISBN 0444516166ISBN 9780444516169
Microelectromechanical systems.Electronic books.

Analysis and design principles of MEMS devices
LDR:02737nam 2200301Ii 4500 001 363264
005 20130114165259
009 157799
010 1 $a 0444516166
010 1 $a 9780444516169
100 $a 20070802d2005 u0engy0103 b
101 0 $a eng
102 $a ne
135 $a v
200 1 $a Analysis and design principles of MEMS devices $f by Minhang Bao.
204 1 $a [electronic resource]
210 $a Amsterdam $a Boston $a London $c Elsevier $d 2005.
215 1 $a xii, 312 p. $c ill. $d 25 cm.
300 $a Electronic reproduction. Amsterdam : Elsevier Science & Technology, 2007.
320 $a Includes bibliographical references and index.
327 0 $a Chapter 1. Introduction to MEMS devices $a -- Chapter 2. Basic mechanics of beam and diaphragm structures $a -- Chapter 3. Air Damping $a -- Chapter 4. Electrostatic Actuation $a -- Chapter 5. Capacitive Sensing and Effects of Electrical Excitation $a -- Chapter 6. Piezoresistive Sensing.
330 0 $a Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book.
452 1 $1 0101 $a 0444516166
606 $a Microelectromechanical systems. $3 454463
606 $a Electronic books. $3 452603
676 $a 621.381 $v 22
680 $a TK7875 $b .B36 2005eb
700 1 $a Bao $b Min-Hang. $3 454462
712 0 2 $a ScienceDirect (Online service) $3 454379
801 0 $a tw $b TUL $c 20090617
801 1 $a tw $b TUL $c 20090617
856 7 $u http://www.engineeringvillage.com/controller/servlet/OpenURL?genre=book&isbn=9780444516169 $z An electronic book accessible through the World Wide Web; click for information
856 7 $u http://www.sciencedirect.com/science/book/9780444516169 $z An electronic book accessible through the World Wide Web; click for information